The performance of nanophotonic building blocks such as photonic wires and photonic crystals are rapidly improving, with very low propagation loss and very high cavity Q-factors being reported. In order to facilitate further improvements in performance the ability to quantitatively measure topological imperfections such as sidewall roughness on a sub-nm scale becomes essential. In this paper we use atomic force microscopy (AFM) on tilted samples to obtain the most detailed sidewall roughness measurements yet on nanophotonic structures.
|Title of host publication||European Conference on Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007.|
|Publication status||Published - 2007|
|Event||Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007 - Munich, Germany|
Duration: 17 Jun 2007 → 22 Jun 2007
|Conference||Conference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007|
|Period||17/06/2007 → 22/06/2007|