Sidewall roughness measurement of photonic wires and photonic crystals

Mikael Svalgaard, Lars Hagedorn Frandsen, Jørgen Garnæs, A. Kühle

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Abstract

The performance of nanophotonic building blocks such as photonic wires and photonic crystals are rapidly improving, with very low propagation loss and very high cavity Q-factors being reported. In order to facilitate further improvements in performance the ability to quantitatively measure topological imperfections such as sidewall roughness on a sub-nm scale becomes essential. In this paper we use atomic force microscopy (AFM) on tilted samples to obtain the most detailed sidewall roughness measurements yet on nanophotonic structures.
Original languageEnglish
Title of host publicationEuropean Conference on Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007.
PublisherIEEE
Publication date2007
Pages1-1
ISBN (Print)978-1-4244-0931-0
DOIs
Publication statusPublished - 2007
EventConference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007 - Munich, Germany
Duration: 17 Jun 200722 Jun 2007
http://2007.cleoeurope.org/

Conference

ConferenceConference on Lasers and Electro-Optics and International Quantum Electronics Conference 2007
CountryGermany
CityMunich
Period17/06/200722/06/2007
Internet address

Bibliographical note

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