Fingerprint
Dive into the research topics of 'Shot-filling effects in nanometer-scale electron-beam lithography'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Shot-filling effects in nanometer-scale electron-beam lithography
Marcus Albrechtsen*, Babak Vosoughi Lahijani, Rasmus Ellebæk Christiansen, Vy Thi Hoang Nguyen, Laura Nevenka Casses, Søren Engelberth Hansen, Philip Trøst Kristensen, Nicolas Stenger, Ole Sigmund, Henri Jansen, Jesper Mørk, Søren Stobbe
*Corresponding author for this work
Research output: Contribution to conference › Conference abstract for conference › Research › peer-review
148
Downloads (Orbit)