Sheet Resistance Measurement of Thin Metal Films Using Reflection-Mode THz-TDS

Roy Kelner; Jonas Due Buron; Peter Uhd Jepsen

doi:10.1109/IRMMW-THz50926.2021.9567339

Sheet Resistance Measurement of Thin Metal Films Using Reflection-Mode THz-TDS

Roy Kelner, Jonas Due Buron, Peter Uhd Jepsen

Center for Nanostructured Graphene

CAPRES A/S

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Abstract

Micro four-point probe technology can reliably be used to measure the sheet resistance of thin metal films, with great accuracy and repeatability. In this work, we investigate the suitability of using reflection-mode teraherz time-domain spectroscopy for the same task. The agreement between the two methods places reflection-mode terahertz time-domain spectroscopy as a viable tool for thin metal film analysis.

Original language	English
Publication date	2021
Number of pages	1
DOIs	https://doi.org/10.1109/IRMMW-THz50926.2021.9567339
Publication status	Published - 2021
Event	46^th International Conference on Infrared, Millimeter and Terahertz Waves - Chengdu, China Duration: 29 Aug 2021 → 3 Sept 2021

Conference

Conference	46^th International Conference on Infrared, Millimeter and Terahertz Waves
Country/Territory	China
City	Chengdu
Period	29/08/2021 → 03/09/2021

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title = "Sheet Resistance Measurement of Thin Metal Films Using Reflection-Mode THz-TDS",

abstract = "Micro four-point probe technology can reliably be used to measure the sheet resistance of thin metal films, with great accuracy and repeatability. In this work, we investigate the suitability of using reflection-mode teraherz time-domain spectroscopy for the same task. The agreement between the two methods places reflection-mode terahertz time-domain spectroscopy as a viable tool for thin metal film analysis.",

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TY - ABST

T1 - Sheet Resistance Measurement of Thin Metal Films Using Reflection-Mode THz-TDS

AU - Kelner, Roy

AU - Buron, Jonas Due

AU - Uhd Jepsen, Peter

PY - 2021

Y1 - 2021

N2 - Micro four-point probe technology can reliably be used to measure the sheet resistance of thin metal films, with great accuracy and repeatability. In this work, we investigate the suitability of using reflection-mode teraherz time-domain spectroscopy for the same task. The agreement between the two methods places reflection-mode terahertz time-domain spectroscopy as a viable tool for thin metal film analysis.

AB - Micro four-point probe technology can reliably be used to measure the sheet resistance of thin metal films, with great accuracy and repeatability. In this work, we investigate the suitability of using reflection-mode teraherz time-domain spectroscopy for the same task. The agreement between the two methods places reflection-mode terahertz time-domain spectroscopy as a viable tool for thin metal film analysis.

U2 - 10.1109/IRMMW-THz50926.2021.9567339

DO - 10.1109/IRMMW-THz50926.2021.9567339

M3 - Conference abstract for conference

T2 - 46<sup>th</sup> International Conference on Infrared, Millimeter and Terahertz Waves

Y2 - 29 August 2021 through 3 September 2021

ER -

Sheet Resistance Measurement of Thin Metal Films Using Reflection-Mode THz-TDS

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