Sheath-lens probe for negative ion detection in reactive plasmas

Eugen Stamate, H. Sugai, O. Takai, K. Ohe

Research output: Contribution to journalJournal articlepeer-review

Abstract

A method that allows easy and inexpensive detection of negative ions is introduced. The method is based upon the electrostatic lens effect of the sheath layer evolving to a positively biased planar probe that focuses the negative charges to distinct regions on the surface. Trajectories of negative ions inside the sheath are obtained after computing the potential and electric field distribution by solving in three dimensions the nonlinear Poisson equation. The negative ions’ flux to square and disk probes is developed in Ar/SF6 and O2 plasmas. The method allows negative ion detection with sensitivity higher than that of Langmuir probes. © 2004 American Institute of Physics.
Original languageEnglish
JournalJournal of Applied Physics
Volume95
Pages (from-to)830-833
ISSN0021-8979
DOIs
Publication statusPublished - 2004
Externally publishedYes

Fingerprint

Dive into the research topics of 'Sheath-lens probe for negative ion detection in reactive plasmas'. Together they form a unique fingerprint.

Cite this