Sensivity study of micro four-point probe measurements on small samples

Fei Wang; Dirch Hjorth Petersen; Torben Mikael Hansen; Toke Riishøj Henriksen; Peter Bøggild; Ole Hansen

Sensivity study of micro four-point probe measurements on small samples

Fei Wang, Dirch Hjorth Petersen, Torben Mikael Hansen, Toke Riishøj Henriksen, Peter Bøggild, Ole Hansen

Research output: Contribution to conference › Poster › Research › peer-review

Original language	English
Publication date	2009
Publication status	Published - 2009
Event	International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling - Napa Valley, United States Duration: 26 Apr 2009 → 29 Apr 2009

Workshop

Workshop	International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
Country/Territory	United States
City	Napa Valley
Period	26/04/2009 → 29/04/2009

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@conference{a5674241f31748cca1a81f60b2b8c683,

title = "Sensivity study of micro four-point probe measurements on small samples",

author = "Fei Wang and Petersen, {Dirch Hjorth} and Hansen, {Torben Mikael} and Henriksen, {Toke Riish{\o}j} and Peter B{\o}ggild and Ole Hansen",

year = "2009",

language = "English",

note = "International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling, INSIGHT 2009 ; Conference date: 26-04-2009 Through 29-04-2009",

}

Sensivity study of micro four-point probe measurements on small samples. / Wang, Fei; Petersen, Dirch Hjorth; Hansen, Torben Mikael et al.
2009. Poster session presented at International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling, Napa Valley, California, United States.

Research output: Contribution to conference › Poster › Research › peer-review

TY - CONF

T1 - Sensivity study of micro four-point probe measurements on small samples

AU - Wang, Fei

AU - Petersen, Dirch Hjorth

AU - Hansen, Torben Mikael

AU - Henriksen, Toke Riishøj

AU - Bøggild, Peter

AU - Hansen, Ole

PY - 2009

Y1 - 2009

M3 - Poster

T2 - International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling

Y2 - 26 April 2009 through 29 April 2009

ER -