Sensivity study of micro four-point probe measurements on small samples

Fei Wang, Dirch Hjorth Petersen, Torben Mikael Hansen, Toke Riishøj Henriksen, Peter Bøggild, Ole Hansen

    Research output: Contribution to conferencePosterResearchpeer-review

    Original languageEnglish
    Publication date2009
    Publication statusPublished - 2009
    EventInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling - Napa Valley, United States
    Duration: 26 Apr 200929 Apr 2009

    Workshop

    WorkshopInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
    CountryUnited States
    CityNapa Valley
    Period26/04/200929/04/2009

    Cite this

    Wang, F., Petersen, D. H., Hansen, T. M., Henriksen, T. R., Bøggild, P., & Hansen, O. (2009). Sensivity study of micro four-point probe measurements on small samples. Poster session presented at International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling, Napa Valley, United States.