Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

David Larsson, Anders Greve, Jørn Märcher Hvam, Anja Boisen, Kresten Yvind

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We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was 60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed.
Original languageEnglish
JournalApplied Physics Letters
Issue number9
Pages (from-to)091103
Publication statusPublished - 2009

Bibliographical note

Copyright (2009) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.


  • laser noise
  • laser feedback
  • cantilevers
  • optical polymers
  • light interferometry
  • nanomechanics
  • antireflection coatings
  • surface emitting lasers
  • nanosensors
  • optical sensors

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