Abstract
In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment.
Original language | English |
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Journal | Microelectronic Engineering |
Volume | 87 |
Issue number | 5-8 |
Pages (from-to) | 708-711 |
ISSN | 0167-9317 |
DOIs | |
Publication status | Published - 2010 |
Keywords
- Cantilever-based sensing
- DVD pickup head
- SU-8
- Chip holder
- Microfabrication