Self-aligned cantilever positioning for on-substrate measurements using DVD pickup head

Filippo Bosco, E. T. Hwu, Stephan Urs Keller, Anders Greve, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    In this paper, we present a novel approach for measuring the resonant frequency of cantilevers fabricated in polymeric materials. We re-designed the use of a commercial DVD-ROM pickup head and combine it with a glass-polymer substrate in order to obtain a light and portable device to measure the resonant frequency of polymer cantilevers. The use of the Pyrex-SU-8 clamping substrate allows an easy replacement of the cantilever chips and a fast alignment process to the DVD-ROM laser beam. We show measurements of thermal noise for SU-8 and TOPAS cantilevers in air and liquid environment.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume87
    Issue number5-8
    Pages (from-to)708-711
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2010

    Keywords

    • Cantilever-based sensing
    • DVD pickup head
    • SU-8
    • Chip holder
    • Microfabrication

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