Self-actuated Polymeric Valve for Autonomous Sensing and Mixing

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    Abstract

    We present an autonomously operated microvalve array for chemical sensing and mixing, which gains the actuation energy from a chemical reaction on the valve structure. An 8-μm-thick flapper valve made in SU-8 is coated with stress-loaded Al on one side and Ti on the other side. The metal films keep the flapper in a flat, stress-balanced closed position. Upon contact with an analyte composed of a NaOH solution the Al film is etched from the valve surface unbalancing the surface stress and bending the flapper. A deflection of up to 45 μm is observed allowing for effective release of a green marker from a reservoir. Calculations reveal that valve operation with stress originating from biochemical processes will require considerable enhancement of the actuation efficiency.
    Original languageEnglish
    Title of host publicationThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
    Volume2
    PublisherIEEE
    Publication date2005
    Pages1569-1572
    ISBN (Print)0-7803-8994-8
    DOIs
    Publication statusPublished - 2005
    Event13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05) - Seoul, Korea, Republic of
    Duration: 1 Jan 2005 → …
    Conference number: 13

    Conference

    Conference13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05)
    Number13
    Country/TerritoryKorea, Republic of
    CitySeoul
    Period01/01/2005 → …

    Bibliographical note

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