Abstract
We present an autonomously operated microvalve array for chemical sensing and mixing, which gains the actuation energy from a chemical reaction on the valve structure. An 8-μm-thick flapper valve made in SU-8 is coated with stress-loaded Al on one side and Ti on the other side. The metal films keep the flapper in a flat, stress-balanced closed position. Upon contact with an analyte composed of a NaOH solution the Al film is etched from the valve surface unbalancing the surface stress and bending the flapper. A deflection of up to 45 μm is observed allowing for effective release of a green marker from a reservoir. Calculations reveal that valve operation with stress originating from biochemical processes will require considerable enhancement of the actuation efficiency.
Original language | English |
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Title of host publication | The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. |
Volume | 2 |
Publisher | IEEE |
Publication date | 2005 |
Pages | 1569-1572 |
ISBN (Print) | 0-7803-8994-8 |
DOIs | |
Publication status | Published - 2005 |
Event | 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05) - Seoul, Korea, Republic of Duration: 1 Jan 2005 → … Conference number: 13 |
Conference
Conference | 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '05) |
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Number | 13 |
Country/Territory | Korea, Republic of |
City | Seoul |
Period | 01/01/2005 → … |