Abstract
Anodising of aluminium is a well-known technology usually applied to surface treatment. With this technology a transparent layer of oxide is established on the surface of a workpiece. For the establishment of components in aluminium with certain light transmitting areas anodising was investigated. A process sequence involving application of photoresist, lithography using UV light, development of photoresist and subsequent anodising was established and investigated. The effect of various process parameters, material composition as well as pattern layout on the final component quality was investigated. It was found that with this technology it is possible to create light transmitting areas on aluminium workpieces consisting of either dot-like structures or continuous patterns.
| Original language | English |
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| Title of host publication | Towards synthesis of micro-/nano systems |
| Editors | Fumihiko Kimura |
| Publisher | Springer |
| Publication date | 2006 |
| Pages | 175-180 |
| ISBN (Print) | 1-84628-558-5 |
| Publication status | Published - 2006 |
| Event | 11th international conference on precision engineering - Tokyo, Japan Duration: 1 Jan 2006 → … |
Conference
| Conference | 11th international conference on precision engineering |
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| City | Tokyo, Japan |
| Period | 01/01/2006 → … |