Screen printed thick film based pMUT arrays

Tobias Hedegaard, T Pedersen, Erik Vilain Thomsen, Rasmus Lou-Møller, K Hansen, T Zawada

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This article reports on the fabrication and characterization of lambda-pitched piezoelectric micromachined ultrasound transducer (pMUT) arrays fabricated using a unique process combining conventional silicon technology and low cost screen printing of thick film PZT. The pMUTs are designed as 8 element membrane based devices dimensioned to operate in bending mode in the 1-10 MHz regime. The devices are characterized using impedance measurements as well as acoustic pulse echo measurements. The characterization showed resonance frequencies for the bending mode around 6-8 MHz.
Original languageEnglish
Title of host publicationIEEE Ultrasonics Symposium, 2008. IUS 2008.
Publication date2008
ISBN (Print)978-1-4244-2428-3
Publication statusPublished - 2008
Event2008 IEEE International Ultrasonics Symposium - Beijing, China
Duration: 2 Nov 20085 Nov 2008


Conference2008 IEEE International Ultrasonics Symposium
Internet address

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