Screen printed thick film based pMUT arrays

Tobias Hedegaard, T Pedersen, Erik Vilain Thomsen, Rasmus Lou-Møller, K Hansen, T Zawada

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Abstract

This article reports on the fabrication and characterization of lambda-pitched piezoelectric micromachined ultrasound transducer (pMUT) arrays fabricated using a unique process combining conventional silicon technology and low cost screen printing of thick film PZT. The pMUTs are designed as 8 element membrane based devices dimensioned to operate in bending mode in the 1-10 MHz regime. The devices are characterized using impedance measurements as well as acoustic pulse echo measurements. The characterization showed resonance frequencies for the bending mode around 6-8 MHz.
Original languageEnglish
Title of host publicationIEEE Ultrasonics Symposium, 2008. IUS 2008.
PublisherIEEE
Publication date2008
ISBN (Print)978-1-4244-2428-3
DOIs
Publication statusPublished - 2008
Event2008 IEEE International Ultrasonics Symposium - Beijing, China
Duration: 2 Nov 20085 Nov 2008
http://ewh.ieee.org/conf/ius_2008/

Conference

Conference2008 IEEE International Ultrasonics Symposium
CountryChina
CityBeijing
Period02/11/200805/11/2008
Internet address

Bibliographical note

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Cite this

Hedegaard, T., Pedersen, T., Thomsen, E. V., Lou-Møller, R., Hansen, K., & Zawada, T. (2008). Screen printed thick film based pMUT arrays. In IEEE Ultrasonics Symposium, 2008. IUS 2008. IEEE. https://doi.org/10.1109/ULTSYM.2008.0526