This article reports on the fabrication and characterization of lambda-pitched piezoelectric micromachined ultrasound transducer (pMUT) arrays fabricated using a unique process combining conventional silicon technology and low cost screen printing of thick film PZT. The pMUTs are designed as 8 element membrane based devices dimensioned to operate in bending mode in the 1-10 MHz regime. The devices are characterized using impedance measurements as well as acoustic pulse echo measurements. The characterization showed resonance frequencies for the bending mode around 6-8 MHz.
|Title of host publication||IEEE Ultrasonics Symposium, 2008. IUS 2008.|
|Publication status||Published - 2008|
|Event||2008 IEEE International Ultrasonics Symposium - Beijing, China|
Duration: 2 Nov 2008 → 5 Nov 2008
|Conference||2008 IEEE International Ultrasonics Symposium|
|Period||02/11/2008 → 05/11/2008|