Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Ruichao Xu; Anders Lei; T.L. Christiansen; K. Hansen; M. Guizzetti; Karen Birkelund; Erik Vilain Thomsen; Ole Hansen

doi:10.1109/TRANSDUCERS.2011.5969848

Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Ruichao Xu, Anders Lei, T.L. Christiansen, K. Hansen, M. Guizzetti, Karen Birkelund, Erik Vilain Thomsen, Ole Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material. It provides mechanical support but it also reduces the power output. Our device replaces the support with another layer of the piezoelectric material, and with the absence of an inactive mechanical support all of the stresses induced by the vibrations will be harvested by the active piezoelectric elements.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
Publisher	IEEE
Publication date	2011
Pages	679-682
ISBN (Print)	978-145770157-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969848
Publication status	Published - 2011
Event	16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://www.transducers11-beijing.org/

Conference

Conference	16th International Solid-State Sensors, Actuators and Microsystems Conference
Number	16
Country/Territory	China
City	Beijing
Period	05/06/2011 → 09/06/2011
Internet address	http://www.transducers11-beijing.org/

Keywords

Vibrations
Micromechanical devices
Resonant frequency
Electrodes
Energy harvesting
Thick films
Fabrication

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10.1109/TRANSDUCERS.2011.5969848

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Xu, R., Lei, A., Christiansen, T. L., Hansen, K., Guizzetti, M., Birkelund, K., Thomsen, E. V., & Hansen, O. (2011). Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (pp. 679-682). IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969848

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title = "Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting",

abstract = "We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material. It provides mechanical support but it also reduces the power output. Our device replaces the support with another layer of the piezoelectric material, and with the absence of an inactive mechanical support all of the stresses induced by the vibrations will be harvested by the active piezoelectric elements.",

keywords = "Vibrations, Micromechanical devices, Resonant frequency, Electrodes, Energy harvesting, Thick films, Fabrication",

author = "Ruichao Xu and Anders Lei and T.L. Christiansen and K. Hansen and M. Guizzetti and Karen Birkelund and Thomsen, {Erik Vilain} and Ole Hansen",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969848",

language = "English",

isbn = "978-145770157-3",

pages = "679--682",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference",

publisher = "IEEE",

address = "United States",

note = "16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

url = "http://www.transducers11-beijing.org/",

}

Xu, R, Lei, A, Christiansen, TL, Hansen, K, Guizzetti, M, Birkelund, K , Thomsen, EV & Hansen, O 2011, Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, pp. 679-682, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 05/06/2011. https://doi.org/10.1109/TRANSDUCERS.2011.5969848

Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting. / Xu, Ruichao; Lei, Anders; Christiansen, T.L. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2011. p. 679-682.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

AU - Xu, Ruichao

AU - Lei, Anders

AU - Christiansen, T.L.

AU - Hansen, K.

AU - Guizzetti, M.

AU - Birkelund, Karen

AU - Thomsen, Erik Vilain

AU - Hansen, Ole

N1 - Conference code: 16

PY - 2011

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N2 - We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material. It provides mechanical support but it also reduces the power output. Our device replaces the support with another layer of the piezoelectric material, and with the absence of an inactive mechanical support all of the stresses induced by the vibrations will be harvested by the active piezoelectric elements.

AB - We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material. It provides mechanical support but it also reduces the power output. Our device replaces the support with another layer of the piezoelectric material, and with the absence of an inactive mechanical support all of the stresses induced by the vibrations will be harvested by the active piezoelectric elements.

KW - Vibrations

KW - Micromechanical devices

KW - Resonant frequency

KW - Electrodes

KW - Energy harvesting

KW - Thick films

KW - Fabrication

U2 - 10.1109/TRANSDUCERS.2011.5969848

DO - 10.1109/TRANSDUCERS.2011.5969848

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BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

PB - IEEE

T2 - 16th International Solid-State Sensors, Actuators and Microsystems Conference

Y2 - 5 June 2011 through 9 June 2011

ER -

Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

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