Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Ruichao Xu, Anders Lei, T.L. Christiansen, K. Hansen, M. Guizzetti, Karen Birkelund, Erik Vilain Thomsen, Ole Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    We present a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The most common piezoelectric energy harvesting devices utilize a cantilever beam of a non piezoelectric material as support beneath or in-between the piezoelectric material. It provides mechanical support but it also reduces the power output. Our device replaces the support with another layer of the piezoelectric material, and with the absence of an inactive mechanical support all of the stresses induced by the vibrations will be harvested by the active piezoelectric elements.
    Original languageEnglish
    Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
    PublisherIEEE
    Publication date2011
    Pages679-682
    ISBN (Print)978-145770157-3
    DOIs
    Publication statusPublished - 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://www.transducers11-beijing.org/

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Number16
    CountryChina
    CityBeijing
    Period05/06/201109/06/2011
    Internet address

    Keywords

    • Vibrations
    • Micromechanical devices
    • Resonant frequency
    • Electrodes
    • Energy harvesting
    • Thick films
    • Fabrication

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