Scanning White light interferometry: calibration and application to roughness assesment

Paolo Bariani

    Research output: Book/ReportReportResearch

    Abstract

    This report refers to an experimental investigation recently completed. The aim was to gain some knowledge of the application of white light interferometry to surface metrology. The following issues were addressed by the present work: • How a white light interferometry microscope works, what similarities and differences compared to laser interferometry can be identified. • What the main error sources are, and how such an instrument should be calibrated. The possibility of using calibration standards developed for other techniques was evaluated. • The technique was then applied to assessment of polymer replicated EDM rough topographies. The present method resulted to be not suitable for the purpose. • Based on the matured experience, some conclusions regarding the applicability of the method to some typical surface metrology problems to be investigated at nanometer-scale were drawn This work is based on the use of the Zygo New view 100 3D instrument at Teknologisk Institute.
    Original languageEnglish
    PublisherInstitut for Produktion og Ledelse, DTU
    Number of pages40
    Publication statusPublished - 2003

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