Scanning nanoscale multiprobes for conductivity measurements

Peter Bøggild, Torben Mikael Hansen, Oliver Kuhn, Francois Grey, T. Junno, L. Montelius

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    Abstract

    We report fabrication and measurements with two- and four-point probes with nanoscale dimensions, for high spatial resolution conductivity measurements on surfaces and thin films. By combination of conventional microfabrication and additive three-dimensional nanolithography, we have obtained electrode spacings down to 200 nm. At the tips of four silicon oxide microcantilevers, narrow carbon tips are grown in converging directions and subsequently coated with a conducting layer. The probe is placed in contact with a conducting surface, whereby the electrode resistance can be determined. The nanoelectrodes withstand considerable contact force before breaking. The probe offers a unique possibility to position the voltage sensors, as well as the source and drain electrodes in areas of nanoscale dimensions. ©2000 American Institute of Physics.
    Original languageEnglish
    JournalReview of Scientific Instruments
    Volume71
    Issue number7
    Pages (from-to)2781-2783
    ISSN0034-6748
    DOIs
    Publication statusPublished - 2000

    Bibliographical note

    Copyright (2000) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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