Scanning Acoustic Microscopy for Quality Assurance of MEMS Sensors

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Original language	English
Title of host publication	Proceedings of Sensor 2003
Publication date	2003
Pages	255-260
Article number	A9.5
Publication status	Published - 2003
Externally published	Yes
Event	Sensor 2003: 11^th international conference - Exhibition Centre Nuremberg, Nuremberg, Germany Duration: 13 May 2003 → 15 May 2003

Conference	Sensor 2003: 11^th international conference
Location	Exhibition Centre Nuremberg
Country/Territory	Germany
City	Nuremberg
Period	13/05/2003 → 15/05/2003

Access to Document

@inproceedings{c02fd33f15d447d2a03537a9b0049db3,

title = "Scanning Acoustic Microscopy for Quality Assurance of MEMS Sensors",

author = "Jakob Janting",

year = "2003",

language = "English",

pages = "255--260",

booktitle = "Proceedings of Sensor 2003",

note = "Sensor 2003: 11<sup>th</sup> international conference ; Conference date: 13-05-2003 Through 15-05-2003",

}