Scanning Acoustic Microscopy for Quality Assurance of MEMS Sensors

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Original languageEnglish
Title of host publicationProceedings of Sensor 2003
Publication date2003
Pages255-260
Article numberA9.5
Publication statusPublished - 2003
Externally publishedYes
EventSensor 2003: 11th international conference - Exhibition Centre Nuremberg, Nuremberg, Germany
Duration: 13 May 200315 May 2003

Conference

ConferenceSensor 2003: 11th international conference
LocationExhibition Centre Nuremberg
CountryGermany
CityNuremberg
Period13/05/200315/05/2003

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