Row-Column Addressed 2-D CMUT Arrays with Integrated Apodization

Thomas Lehrmann Christiansen; Morten Fischer Rasmussen; Jørgen Arendt Jensen; Erik Vilain Thomsen

doi:10.1109/ULTSYM.2014.0147

Row-Column Addressed 2-D CMUT Arrays with Integrated Apodization

Thomas Lehrmann Christiansen, Morten Fischer Rasmussen, Jørgen Arendt Jensen, Erik Vilain Thomsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

701 Downloads (Pure)

Abstract

Experimental results from row-column addressed capacitive micromachined ultrasonic transducers (CMUTs) with integrated apodization are presented. The apodization is applied by varying the density of CMUT cells in the array with the objective of damping the edge waves originating from the element ends. Two row-column addressed 32+32 CMUT arrays are produced using a wafer-bonding technique, one with and one without integrated apodization. Hydrophone measurements of the emitted pressure field from the array with integrated apodization show a
reduction in edge wave energy of 8.4 dB (85 %) compared to the array without integrated apodization. Field II simulations yield a corresponding reduction of 13.0 dB (95 %). The simulations are able to replicate the measured pressure field, proving the predictability of the technique.

Original language	English
Title of host publication	Proceedings of 2014 IEEE International Ultrasonics Symposium
Publisher	IEEE
Publication date	2014
Pages	600-603
ISBN (Print)	9781479970490
DOIs	https://doi.org/10.1109/ULTSYM.2014.0147
Publication status	Published - 2014
Event	2014 IEEE International Ultrasonics Symposium - Hilton Hotel, Chicago, United States Duration: 3 Sept 2014 → 6 Sept 2014 https://ieeexplore.ieee.org/xpl/conhome/6917616/proceeding

Conference

Conference	2014 IEEE International Ultrasonics Symposium
Location	Hilton Hotel
Country/Territory	United States
City	Chicago
Period	03/09/2014 → 06/09/2014
Internet address	https://ieeexplore.ieee.org/xpl/conhome/6917616/proceeding

Access to Document

10.1109/ULTSYM.2014.0147

Preprint christiansen et al ius 2014Submitted manuscript, 4.04 MB

OpenUrl availability

Full text

Cite this

@inproceedings{d8e97eee2fd64f1ba719cc9f7a81b284,

title = "Row-Column Addressed 2-D CMUT Arrays with Integrated Apodization",

abstract = "Experimental results from row-column addressed capacitive micromachined ultrasonic transducers (CMUTs) with integrated apodization are presented. The apodization is applied by varying the density of CMUT cells in the array with the objective of damping the edge waves originating from the element ends. Two row-column addressed 32+32 CMUT arrays are produced using a wafer-bonding technique, one with and one without integrated apodization. Hydrophone measurements of the emitted pressure field from the array with integrated apodization show areduction in edge wave energy of 8.4 dB (85 %) compared to the array without integrated apodization. Field II simulations yield a corresponding reduction of 13.0 dB (95 %). The simulations are able to replicate the measured pressure field, proving the predictability of the technique.",

author = "Christiansen, {Thomas Lehrmann} and Rasmussen, {Morten Fischer} and Jensen, {J{\o}rgen Arendt} and Thomsen, {Erik Vilain}",

year = "2014",

doi = "10.1109/ULTSYM.2014.0147",

language = "English",

isbn = "9781479970490",

pages = "600--603",

booktitle = "Proceedings of 2014 IEEE International Ultrasonics Symposium",

publisher = "IEEE",

address = "United States",

note = "2014 IEEE International Ultrasonics Symposium, IUS 2014 ; Conference date: 03-09-2014 Through 06-09-2014",

url = "https://ieeexplore.ieee.org/xpl/conhome/6917616/proceeding",

}

TY - GEN

T1 - Row-Column Addressed 2-D CMUT Arrays with Integrated Apodization

AU - Christiansen, Thomas Lehrmann

AU - Rasmussen, Morten Fischer

AU - Jensen, Jørgen Arendt

AU - Thomsen, Erik Vilain

PY - 2014

Y1 - 2014

N2 - Experimental results from row-column addressed capacitive micromachined ultrasonic transducers (CMUTs) with integrated apodization are presented. The apodization is applied by varying the density of CMUT cells in the array with the objective of damping the edge waves originating from the element ends. Two row-column addressed 32+32 CMUT arrays are produced using a wafer-bonding technique, one with and one without integrated apodization. Hydrophone measurements of the emitted pressure field from the array with integrated apodization show areduction in edge wave energy of 8.4 dB (85 %) compared to the array without integrated apodization. Field II simulations yield a corresponding reduction of 13.0 dB (95 %). The simulations are able to replicate the measured pressure field, proving the predictability of the technique.

AB - Experimental results from row-column addressed capacitive micromachined ultrasonic transducers (CMUTs) with integrated apodization are presented. The apodization is applied by varying the density of CMUT cells in the array with the objective of damping the edge waves originating from the element ends. Two row-column addressed 32+32 CMUT arrays are produced using a wafer-bonding technique, one with and one without integrated apodization. Hydrophone measurements of the emitted pressure field from the array with integrated apodization show areduction in edge wave energy of 8.4 dB (85 %) compared to the array without integrated apodization. Field II simulations yield a corresponding reduction of 13.0 dB (95 %). The simulations are able to replicate the measured pressure field, proving the predictability of the technique.

U2 - 10.1109/ULTSYM.2014.0147

DO - 10.1109/ULTSYM.2014.0147

M3 - Article in proceedings

SN - 9781479970490

SP - 600

EP - 603

BT - Proceedings of 2014 IEEE International Ultrasonics Symposium

PB - IEEE

T2 - 2014 IEEE International Ultrasonics Symposium

Y2 - 3 September 2014 through 6 September 2014

ER -

Row-Column Addressed 2-D CMUT Arrays with Integrated Apodization

Abstract

Conference

Access to Document

OpenUrl availability

Fingerprint

Cite this