Roughness measurements with an AFM-CMM instrument

Francesco Marinello, Paolo Bariani, Leonardo De Chiffre, Hans Nørgaard Hansen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    In this paper, application of a Large Range AFM to roughness analyses is presented: measurements on different calibration standards covering a range of 4.8×0.1 mm2 were performed. Upon extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards. Profiles from the Large range AFM were directly compared with those obtained by a traceable stylus instrument, resulting from probing the same surface region.
    Original languageEnglish
    Title of host publicationProc. of 5th euspen International Conference
    EditorsF.Chevrier, T.Taliercio, P.Falgayrettes, P.Gall-Borrut
    Publication date2005
    Publication statusPublished - 2005
    Event5th International Conference of the European Society for Precision Engineering and Nanotechnology - Montpellier, France
    Duration: 8 May 200512 May 2005
    Conference number: 5

    Conference

    Conference5th International Conference of the European Society for Precision Engineering and Nanotechnology
    Number5
    CountryFrance
    CityMontpellier
    Period08/05/200512/05/2005

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