Roughness measurements with an AFM-CMM instrument

Francesco Marinello; Paolo Bariani; Leonardo De Chiffre; Hans Nørgaard Hansen

Roughness measurements with an AFM-CMM instrument

Francesco Marinello, Paolo Bariani, Leonardo De Chiffre, Hans Nørgaard Hansen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

In this paper, application of a Large Range AFM to roughness analyses is presented: measurements on different calibration standards covering a range of 4.8×0.1 mm2 were performed. Upon extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards. Profiles from the Large range AFM were directly compared with those obtained by a traceable stylus instrument, resulting from probing the same surface region.

Original language	English
Title of host publication	Proc. of 5th euspen International Conference
Editors	F.Chevrier, T.Taliercio, P.Falgayrettes, P.Gall-Borrut
Publication date	2005
Publication status	Published - 2005
Event	5th International Conference of the European Society for Precision Engineering and Nanotechnology - Montpellier, France Duration: 8 May 2005 → 12 May 2005 Conference number: 5

Conference

Conference	5th International Conference of the European Society for Precision Engineering and Nanotechnology
Number	5
Country/Territory	France
City	Montpellier
Period	08/05/2005 → 12/05/2005

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title = "Roughness measurements with an AFM-CMM instrument",

abstract = "In this paper, application of a Large Range AFM to roughness analyses is presented: measurements on different calibration standards covering a range of 4.8×0.1 mm2 were performed. Upon extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards. Profiles from the Large range AFM were directly compared with those obtained by a traceable stylus instrument, resulting from probing the same surface region.",

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note = "5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 ; Conference date: 08-05-2005 Through 12-05-2005",

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T1 - Roughness measurements with an AFM-CMM instrument

AU - Marinello, Francesco

AU - Bariani, Paolo

AU - De Chiffre, Leonardo

AU - Hansen, Hans Nørgaard

N1 - Conference code: 5

PY - 2005

Y1 - 2005

N2 - In this paper, application of a Large Range AFM to roughness analyses is presented: measurements on different calibration standards covering a range of 4.8×0.1 mm2 were performed. Upon extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards. Profiles from the Large range AFM were directly compared with those obtained by a traceable stylus instrument, resulting from probing the same surface region.

AB - In this paper, application of a Large Range AFM to roughness analyses is presented: measurements on different calibration standards covering a range of 4.8×0.1 mm2 were performed. Upon extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards. Profiles from the Large range AFM were directly compared with those obtained by a traceable stylus instrument, resulting from probing the same surface region.

KW - MM05.17

M3 - Article in proceedings

BT - Proc. of 5th euspen International Conference

A2 - null, F.Chevrier, T.Taliercio, P.Falgayrettes, P.Gall-Borrut

T2 - 5th International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 8 May 2005 through 12 May 2005

ER -

Roughness measurements with an AFM-CMM instrument

Abstract

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