Abstract
In this paper, application of a Large Range AFM to roughness analyses is presented: measurements on different calibration standards covering a range of 4.8×0.1 mm2 were performed. Upon extraction of single profiles from the three-dimensional data set, roughness can be evaluated in compliance with ISO standards.
Profiles from the Large range AFM were directly compared with those obtained by a traceable stylus instrument, resulting from probing the same surface region.
Original language | English |
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Title of host publication | Proc. of 5th euspen International Conference |
Editors | F.Chevrier, T.Taliercio, P.Falgayrettes, P.Gall-Borrut |
Publication date | 2005 |
Publication status | Published - 2005 |
Event | 5th International Conference of the European Society for Precision Engineering and Nanotechnology - Montpellier, France Duration: 8 May 2005 → 12 May 2005 Conference number: 5 |
Conference
Conference | 5th International Conference of the European Society for Precision Engineering and Nanotechnology |
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Number | 5 |
Country/Territory | France |
City | Montpellier |
Period | 08/05/2005 → 12/05/2005 |