Robust Layout Synthesis of a MEM Crab-Leg Resonator Using a Constrained Genetic Algorithm

Zhun Fan, Sofiane Achiche

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

The research work carried out in this paper introduces a robust design method for layout synthesis of MEM resonator subject to inherent geometric uncertainties such as the fabrication error on the sidewall of the structure. The robust design problem is formulated as a multi-objective constrained optimization problem with certain assumptions and treated by a special constrained genetic algorithm. The MEM design used for validation is a crab-leg resonator taken from the literature. The results show that the approach proposed in this research can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than typical designs.
Original languageEnglish
Title of host publicationASME 2007 International Design Engineering Technical Conference & Computers and Information in Engineering Conference
Publication date2007
Publication statusPublished - 2007
EventASME 2007 International Design Engineering Technical Conference & Computers and Information in Engineering Conference - Las Vegas, Nevada, USA
Duration: 1 Jan 2007 → …

Conference

ConferenceASME 2007 International Design Engineering Technical Conference & Computers and Information in Engineering Conference
CityLas Vegas, Nevada, USA
Period01/01/2007 → …

Bibliographical note

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