Roads to Ultrathin Silicon Oxides

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
Volume	23
Issue number	1
Pages (from-to)	201-207
ISSN	1553-1813
Publication status	Published - 2005

OpenUrl availability

@article{d611845b366a454a97465eac561e2202,

title = "Roads to Ultrathin Silicon Oxides",

author = "P Morgan and A. Bahari and U. Robenhagen and J.F. Andersen and Jakob Kjelstrup-Hansen and K. Pedersen and M.G. Rao and Z.S. Li",

year = "2005",

language = "English",

volume = "23",

pages = "201--207",

journal = "Journal of Vacuum Science \& Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films",

issn = "1553-1813",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Roads to Ultrathin Silicon Oxides

AU - Morgan, P

AU - Bahari, A.

AU - Robenhagen, U.

AU - Andersen, J.F.

AU - Kjelstrup-Hansen, Jakob

AU - Pedersen, K.

AU - Rao, M.G.

AU - Li, Z.S.

PY - 2005

Y1 - 2005

M3 - Journal article

SN - 1553-1813

VL - 23

SP - 201

EP - 207

JO - Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films

JF - Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films

IS - 1

ER -