Original language | English |
---|---|
Journal | Journal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films |
Volume | 23 |
Issue number | 1 |
Pages (from-to) | 201-207 |
ISSN | 1553-1813 |
Publication status | Published - 2005 |
Roads to Ultrathin Silicon Oxides
P Morgan, A. Bahari, U. Robenhagen, J.F. Andersen, Jakob Kjelstrup-Hansen, K. Pedersen, M.G. Rao, Z.S. Li
Research output: Contribution to journal › Journal article › Research › peer-review