Roads to Ultrathin Silicon Oxides

P Morgan, A. Bahari, U. Robenhagen, J.F. Andersen, Jakob Kjelstrup-Hansen, K. Pedersen, M.G. Rao, Z.S. Li

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalJournal of Vacuum Science & Technology. A: International Journal Devoted to Vacuum, Surfaces, and Films
    Issue number1
    Pages (from-to)201-207
    Publication statusPublished - 2005

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