RHEED study of titanium dioxide with pulsed laser deposition

Inge Lise Rasmussen; Nini Pryds; Jørgen Schou

doi:10.1016/j.apsusc.2008.09.041

RHEED study of titanium dioxide with pulsed laser deposition

Inge Lise Rasmussen, Nini Pryds, Jørgen Schou

Department of Photonics Engineering

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Reflection high-energy electron diffraction (RHEED) operated at high pressure has been used to monitor the growth of thin films of titanium dioxide (TiO2) on (1 0 0) magnesium oxide (MgO) substrates by pulsed laser deposition (PLD). The deposition is performed with a synthetic rutile TiO2 target at low fluence. The topography and structure of the deposited layers are characterized using in situ high pressure RHEED and atomic force microscope (AFM). Based on these observations the growth mode of the films is discussed. The results will be compared to earlier results obtained for the growth of TiN films on (1 0 0) MgO

Original language	English
Journal	Applied Surface Science
Volume	255
Issue number	10
Pages (from-to)	5240-5244
ISSN	0169-4332
DOIs	https://doi.org/10.1016/j.apsusc.2008.09.041
Publication status	Published - 2009
Event	European Materials Research Society Spring Meeting 2008, Symposium B: Laser and Plasma Prossing in Micro- and Nano-Scale Materials Processing and Diagnostic - Strasbourg, France Duration: 26 May 2008 → 30 May 2008 http://www.emrs-strasbourg.com/index.php?option=com_content&task=view&id=193&Itemid=84

Conference

Conference	European Materials Research Society Spring Meeting 2008, Symposium B
Country	France
City	Strasbourg
Period	26/05/2008 → 30/05/2008
Internet address	http://www.emrs-strasbourg.com/index.php?option=com_content&task=view&id=193&Itemid=84

Keywords

Magnetic refrigeration
Fuel Cells and hydrogen

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@inproceedings{fd38d0a9854d4f548d8d537c598c83d1,

title = "RHEED study of titanium dioxide with pulsed laser deposition",

abstract = "Reflection high-energy electron diffraction (RHEED) operated at high pressure has been used to monitor the growth of thin films of titanium dioxide (TiO2) on (1 0 0) magnesium oxide (MgO) substrates by pulsed laser deposition (PLD). The deposition is performed with a synthetic rutile TiO2 target at low fluence. The topography and structure of the deposited layers are characterized using in situ high pressure RHEED and atomic force microscope (AFM). Based on these observations the growth mode of the films is discussed. The results will be compared to earlier results obtained for the growth of TiN films on (1 0 0) MgO",

keywords = "Magnetic refrigeration, Fuel Cells and hydrogen, Magnetisk k{\o}ling, Br{\ae}ndselsceller og brint",

author = "Rasmussen, {Inge Lise} and Nini Pryds and J{\o}rgen Schou",

year = "2009",

doi = "10.1016/j.apsusc.2008.09.041",

language = "English",

volume = "255",

pages = "5240--5244",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

number = "10",

note = "European Materials Research Society Spring Meeting 2008, Symposium B : Laser and Plasma Prossing in Micro- and Nano-Scale Materials Processing and Diagnostic ; Conference date: 26-05-2008 Through 30-05-2008",

url = "http://www.emrs-strasbourg.com/index.php?option=com_content&task=view&id=193&Itemid=84",

}

TY - GEN

T1 - RHEED study of titanium dioxide with pulsed laser deposition

AU - Rasmussen, Inge Lise

AU - Pryds, Nini

AU - Schou, Jørgen

PY - 2009

Y1 - 2009

N2 - Reflection high-energy electron diffraction (RHEED) operated at high pressure has been used to monitor the growth of thin films of titanium dioxide (TiO2) on (1 0 0) magnesium oxide (MgO) substrates by pulsed laser deposition (PLD). The deposition is performed with a synthetic rutile TiO2 target at low fluence. The topography and structure of the deposited layers are characterized using in situ high pressure RHEED and atomic force microscope (AFM). Based on these observations the growth mode of the films is discussed. The results will be compared to earlier results obtained for the growth of TiN films on (1 0 0) MgO

AB - Reflection high-energy electron diffraction (RHEED) operated at high pressure has been used to monitor the growth of thin films of titanium dioxide (TiO2) on (1 0 0) magnesium oxide (MgO) substrates by pulsed laser deposition (PLD). The deposition is performed with a synthetic rutile TiO2 target at low fluence. The topography and structure of the deposited layers are characterized using in situ high pressure RHEED and atomic force microscope (AFM). Based on these observations the growth mode of the films is discussed. The results will be compared to earlier results obtained for the growth of TiN films on (1 0 0) MgO

KW - Magnetic refrigeration

KW - Fuel Cells and hydrogen

KW - Magnetisk køling

KW - Brændselsceller og brint

U2 - 10.1016/j.apsusc.2008.09.041

DO - 10.1016/j.apsusc.2008.09.041

M3 - Conference article

VL - 255

SP - 5240

EP - 5244

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

IS - 10

T2 - European Materials Research Society Spring Meeting 2008, Symposium B

Y2 - 26 May 2008 through 30 May 2008

ER -