RHEED study of titanium dioxide with pulsed laser deposition

Inge Lise Rasmussen, Nini Pryds, Jørgen Schou

Research output: Contribution to journalConference articleResearchpeer-review

Abstract

Reflection high-energy electron diffraction (RHEED) operated at high pressure has been used to monitor the growth of thin films of titanium dioxide (TiO2) on (1 0 0) magnesium oxide (MgO) substrates by pulsed laser deposition (PLD). The deposition is performed with a synthetic rutile TiO2 target at low fluence. The topography and structure of the deposited layers are characterized using in situ high pressure RHEED and atomic force microscope (AFM). Based on these observations the growth mode of the films is discussed. The results will be compared to earlier results obtained for the growth of TiN films on (1 0 0) MgO

Conference

ConferenceEuropean Materials Research Society Spring Meeting 2008, Symposium B
CountryFrance
CityStrasbourg
Period26/05/200830/05/2008
Internet address

Keywords

  • Magnetic refrigeration
  • Fuel Cells and hydrogen

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