Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Dirch Hjorth Petersen, Ole Hansen, Torben M. Hansen, Peter Bøggild, Rong Lin, Daniel Kjær, P.F. Nielsen, T. Clarysse, W. Vandervorst, E. Rosseel, N.S. Bennett, N.E.B. Cowern

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Electrical characterization of ultra-shallow junctions, relying on advanced implant and anneal processes, has received much attention in the past few years since conventional characterization methods fail. With continued scaling of semiconductor devices, the problems associated with conventional techniques will become even more evident. In several recent studies micro four-point probe (M4PP) has been demonstrated as a reliable high precision metrology method for both sheet resistance and Hall effect measurements of ultra-shallow implants and has revealed a promising potential for carrier profiling.
Original languageEnglish
JournalJournal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures
Volume28
Issue number1C
Pages (from-to)27-33
ISSN1071-1023
DOIs
Publication statusPublished - 2010

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