Review of Automated Design and Optimization of MEMS

Sofiane Achiche; Zhun Fan; Francesca Bolognini

doi:10.1109/ISIE.2007.4374941

Review of Automated Design and Optimization of MEMS

Sofiane Achiche
, Zhun Fan
, Francesca Bolognini

University of Cambridge

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.

Original language	English
Title of host publication	2007 IEEE International Symposium on Industrial Electronics
Publisher	IEEE
Publication date	2007
ISBN (Print)	978-1-4244-0755-2
DOIs	https://doi.org/10.1109/ISIE.2007.4374941
Publication status	Published - 2007
Event	2007 IEEE International Symposium on Industrial Electronics - Vigo, Spain Duration: 4 Jun 2007 → 7 Jun 2007 http://www.dte.uvigo.es/isie2007/

Conference

Conference	2007 IEEE International Symposium on Industrial Electronics
Country/Territory	Spain
City	Vigo
Period	04/06/2007 → 07/06/2007
Internet address	http://www.dte.uvigo.es/isie2007/

Bibliographical note

Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

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title = "Review of Automated Design and Optimization of MEMS",

abstract = "In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.",

author = "Sofiane Achiche and Zhun Fan and Francesca Bolognini",

note = "Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE; 2007 IEEE International Symposium on Industrial Electronics, ISIE 2007 ; Conference date: 04-06-2007 Through 07-06-2007",

year = "2007",

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AU - Achiche, Sofiane

AU - Fan, Zhun

AU - Bolognini, Francesca

N1 - Copyright: 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

PY - 2007

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N2 - In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.

AB - In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.

U2 - 10.1109/ISIE.2007.4374941

DO - 10.1109/ISIE.2007.4374941

M3 - Article in proceedings

SN - 978-1-4244-0755-2

BT - 2007 IEEE International Symposium on Industrial Electronics

PB - IEEE

T2 - 2007 IEEE International Symposium on Industrial Electronics

Y2 - 4 June 2007 through 7 June 2007

ER -

Review of Automated Design and Optimization of MEMS

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