In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.
|Title of host publication||2007 IEEE International Symposium on Industrial Electronics|
|Publication status||Published - 2007|
|Event||2007 IEEE International Symposium on Industrial Electronics - Vigo, Spain|
Duration: 4 Jun 2007 → 7 Jun 2007
|Conference||2007 IEEE International Symposium on Industrial Electronics|
|Period||04/06/2007 → 07/06/2007|