Review of Automated Design and Optimization of MEMS

Sofiane Achiche, Zhun Fan, Francesca Bolognini

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Abstract

In recent years MEMS saw a very rapid development. Although many advances have been reached, due to the multiphysics nature of MEMS, their design is still a difficult task carried on mainly by hand calculation. In order to help to overtake such difficulties, attempts to automate MEMS design were carried out. This paper presents a review of these techniques. The design task of MEMS is usually divided into four main stages: System Level, Device Level, Physical Level and the Process Level. The state of the art o automated MEMS design in each of these levels is investigated.
Original languageEnglish
Title of host publication2007 IEEE International Symposium on Industrial Electronics
PublisherIEEE
Publication date2007
ISBN (Print)978-1-4244-0755-2
DOIs
Publication statusPublished - 2007
Event2007 IEEE International Symposium on Industrial Electronics - Vigo, Spain
Duration: 4 Jun 20077 Jun 2007
http://www.dte.uvigo.es/isie2007/

Conference

Conference2007 IEEE International Symposium on Industrial Electronics
CountrySpain
CityVigo
Period04/06/200707/06/2007
Internet address

Bibliographical note

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