Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

S. Ghatnekar-Nilsson; Esko Sebastian Forsén; G. Abadal; J. Verd; F. Campabadal; F. Perez-Murano; J. Esteve; N. Barniol; Anja Boisen; L. Montelius

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

S. Ghatnekar-Nilsson
, Esko Sebastian Forsén
, G. Abadal
, J. Verd
, F. Campabadal
, F. Perez-Murano
, J. Esteve
, N. Barniol
, Anja Boisen
, L. Montelius

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Nanotechnology
Volume	16
Issue number	1
Pages (from-to)	98–102
ISSN	0957-4484
Publication status	Published - 2005

OpenUrl availability

Check availability in DTU Findit

Cite this

@article{51ca5950b89947c298c9f2131ed1c762,

title = "Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography",

author = "S. Ghatnekar-Nilsson and Fors{\'e}n, \{Esko Sebastian\} and G. Abadal and J. Verd and F. Campabadal and F. Perez-Murano and J. Esteve and N. Barniol and Anja Boisen and L. Montelius",

year = "2005",

language = "English",

volume = "16",

pages = "98–102",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing",

number = "1",

}

TY - JOUR

T1 - Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

AU - Ghatnekar-Nilsson, S.

AU - Forsén, Esko Sebastian

AU - Abadal, G.

AU - Verd, J.

AU - Campabadal, F.

AU - Perez-Murano, F.

AU - Esteve, J.

AU - Barniol, N.

AU - Boisen, Anja

AU - Montelius, L.

PY - 2005

Y1 - 2005

M3 - Journal article

SN - 0957-4484

VL - 16

SP - 98

EP - 102

JO - Nanotechnology

JF - Nanotechnology

IS - 1

ER -