Original language | English |
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Journal | Nanotechnology |
Volume | 16 |
Issue number | 1 |
Pages (from-to) | 98–102 |
ISSN | 0957-4484 |
Publication status | Published - 2005 |
Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography
S. Ghatnekar-Nilsson, Esko Sebastian Forsén, G. Abadal, J. Verd, F. Campabadal, F. Perez-Murano, J. Esteve, N. Barniol, Anja Boisen, L. Montelius
Research output: Contribution to journal › Journal article › Research › peer-review