Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

S. Ghatnekar-Nilsson, Esko Sebastian Forsén, G. Abadal, J. Verd, F. Campabadal, F. Perez-Murano, J. Esteve, N. Barniol, Anja Boisen, L. Montelius

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalNanotechnology
    Volume16
    Issue number1
    Pages (from-to)98–102
    ISSN0957-4484
    Publication statusPublished - 2005

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