Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

S. Ghatnekar-Nilsson, Esko Sebastian Forsén, G. Abadal, J. Verd, F. Campabadal, F. Perez-Murano, J. Esteve, N. Barniol, Anja Boisen, L. Montelius

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalNanotechnology
    Volume16
    Issue number1
    Pages (from-to)98–102
    ISSN0957-4484
    Publication statusPublished - 2005

    Cite this

    Ghatnekar-Nilsson, S., Forsén, E. S., Abadal, G., Verd, J., Campabadal, F., Perez-Murano, F., Esteve, J., Barniol, N., Boisen, A., & Montelius, L. (2005). Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography. Nanotechnology, 16(1), 98–102.