Resolution enhancement techniques on a DUV Stepper for roll-to-roll nanofabrication of plasmonic solar light absorbers

^*Corresponding author for this work

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Original language	English
Publication date	2023
Publication status	Published - 2023
Event	2023 Micro and Nano Engineering Conference - Mercure Hotel MOA Berlin, Berlin, Germany Duration: 25 Sept 2023 → 28 Sept 2023 https://mne-2023.org/

Conference	2023 Micro and Nano Engineering Conference
Location	Mercure Hotel MOA Berlin
Country/Territory	Germany
City	Berlin
Period	25/09/2023 → 28/09/2023
Internet address	https://mne-2023.org/

OpenUrl availability

@conference{a74bb33930954fc8bba459afd91176de,

title = "Resolution enhancement techniques on a DUV Stepper for roll-to-roll nanofabrication of plasmonic solar light absorbers",

author = "\{Serra Gonzalez\}, M. and M. Keil and R.A. Deshpande and N. Okulova and R.J. Taboryski",

year = "2023",

language = "English",

note = "2023 Micro and Nano Engineering Conference, MNE 2023 ; Conference date: 25-09-2023 Through 28-09-2023",

url = "https://mne-2023.org/",

}

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

TY - ABST

T1 - Resolution enhancement techniques on a DUV Stepper for roll-to-roll nanofabrication of plasmonic solar light absorbers

AU - Serra Gonzalez, M.

AU - Keil, M.

AU - Deshpande, R.A.

AU - Okulova, N.

AU - Taboryski, R.J.

PY - 2023

Y1 - 2023

M3 - Conference abstract for conference

T2 - 2023 Micro and Nano Engineering Conference

Y2 - 25 September 2023 through 28 September 2023

ER -