A method to improve the resolution of four-point-probe measurements of two-dimensional (2D) and quasi-2D systems is presented. By mapping the conductance on a dense grid around a target area and postprocessing the data, the resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing. The real conductance sheet is simulated by a grid of discrete resistances, which is optimized by means of a standard optimization algorithm, until the simulated voltage-to-current ratios converges with the measurement. The method has been tested against simulated data as well as real measurements and is found to successfully deconvolute the four-point-probe measurements. In conjunction with a newly developed scanning four-point probe with electrode spacing of 1.1 µm, the method can resolve the conductivity with submicron resolution. ©2003 American Institute of Physics.