Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems.

Torben Mikael Hansen, Kurt Stokbro, Ole Hansen, T. Hassenkam, I. Shiraki, S. Hasegawa, Peter Bøggild

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    Abstract

    A method to improve the resolution of four-point-probe measurements of two-dimensional (2D) and quasi-2D systems is presented. By mapping the conductance on a dense grid around a target area and postprocessing the data, the resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing. The real conductance sheet is simulated by a grid of discrete resistances, which is optimized by means of a standard optimization algorithm, until the simulated voltage-to-current ratios converges with the measurement. The method has been tested against simulated data as well as real measurements and is found to successfully deconvolute the four-point-probe measurements. In conjunction with a newly developed scanning four-point probe with electrode spacing of 1.1 µm, the method can resolve the conductivity with submicron resolution. ©2003 American Institute of Physics.
    Original languageEnglish
    JournalReview of Scientific Instruments
    Volume74
    Issue number8
    Pages (from-to)3701-3708
    ISSN0034-6748
    DOIs
    Publication statusPublished - 2003

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    Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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