Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems.

Torben Mikael Hansen; Kurt Stokbro; Ole Hansen; T. Hassenkam; I. Shiraki; S. Hasegawa; Peter Bøggild

doi:10.1063/1.1589161

Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems.

Torben Mikael Hansen, Kurt Stokbro, Ole Hansen, T. Hassenkam, I. Shiraki, S. Hasegawa, Peter Bøggild

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Abstract

A method to improve the resolution of four-point-probe measurements of two-dimensional (2D) and quasi-2D systems is presented. By mapping the conductance on a dense grid around a target area and postprocessing the data, the resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing. The real conductance sheet is simulated by a grid of discrete resistances, which is optimized by means of a standard optimization algorithm, until the simulated voltage-to-current ratios converges with the measurement. The method has been tested against simulated data as well as real measurements and is found to successfully deconvolute the four-point-probe measurements. In conjunction with a newly developed scanning four-point probe with electrode spacing of 1.1 µm, the method can resolve the conductivity with submicron resolution. ©2003 American Institute of Physics.

Original language	English
Journal	Review of Scientific Instruments
Volume	74
Issue number	8
Pages (from-to)	3701-3708
ISSN	0034-6748
DOIs	https://doi.org/10.1063/1.1589161
Publication status	Published - 2003

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Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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title = "Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems.",

abstract = "A method to improve the resolution of four-point-probe measurements of two-dimensional (2D) and quasi-2D systems is presented. By mapping the conductance on a dense grid around a target area and postprocessing the data, the resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing. The real conductance sheet is simulated by a grid of discrete resistances, which is optimized by means of a standard optimization algorithm, until the simulated voltage-to-current ratios converges with the measurement. The method has been tested against simulated data as well as real measurements and is found to successfully deconvolute the four-point-probe measurements. In conjunction with a newly developed scanning four-point probe with electrode spacing of 1.1 µm, the method can resolve the conductivity with submicron resolution. {\textcopyright}2003 American Institute of Physics.",

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AU - Hansen, Torben Mikael

AU - Stokbro, Kurt

AU - Hansen, Ole

AU - Hassenkam, T.

AU - Shiraki, I.

AU - Hasegawa, S.

AU - Bøggild, Peter

N1 - Copyright (2003) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

PY - 2003

Y1 - 2003

N2 - A method to improve the resolution of four-point-probe measurements of two-dimensional (2D) and quasi-2D systems is presented. By mapping the conductance on a dense grid around a target area and postprocessing the data, the resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing. The real conductance sheet is simulated by a grid of discrete resistances, which is optimized by means of a standard optimization algorithm, until the simulated voltage-to-current ratios converges with the measurement. The method has been tested against simulated data as well as real measurements and is found to successfully deconvolute the four-point-probe measurements. In conjunction with a newly developed scanning four-point probe with electrode spacing of 1.1 µm, the method can resolve the conductivity with submicron resolution. ©2003 American Institute of Physics.

AB - A method to improve the resolution of four-point-probe measurements of two-dimensional (2D) and quasi-2D systems is presented. By mapping the conductance on a dense grid around a target area and postprocessing the data, the resolution can be improved by a factor of approximately 50 to better than 1/15 of the four-point-probe electrode spacing. The real conductance sheet is simulated by a grid of discrete resistances, which is optimized by means of a standard optimization algorithm, until the simulated voltage-to-current ratios converges with the measurement. The method has been tested against simulated data as well as real measurements and is found to successfully deconvolute the four-point-probe measurements. In conjunction with a newly developed scanning four-point probe with electrode spacing of 1.1 µm, the method can resolve the conductivity with submicron resolution. ©2003 American Institute of Physics.

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JF - Review of Scientific Instruments

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ER -

Resolution enhancement of scanning four-point-probe measurements on two-dimensional systems.

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