Residual stress in thin-film anodic bonding

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Residual stress in thin-film anodic bonding
Publisher	IOP Publishing
Publication date	1999
Pages	47-50
Publication status	Published - 1999
Event	9th European Workshop on Micromechanics - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998

Workshop	9th European Workshop on Micromechanics
Country/Territory	Norway
City	Ulvik
Period	03/06/1998 → 05/06/1998

OpenUrl availability

@inproceedings{28f8260227b94afaac2046409b39aa8d,

title = "Residual stress in thin-film anodic bonding",

author = "Steen Weichel and Reus, \{Roger De\} and Siebe Bouwstra",

year = "1999",

language = "English",

pages = "47--50",

booktitle = "Residual stress in thin-film anodic bonding",

publisher = "IOP Publishing",

address = "United Kingdom",

note = "9th European Workshop on Micromechanics, MME '98 ; Conference date: 03-06-1998 Through 05-06-1998",

}