Report on non-destructive traceable measuring technologies for micro systems metrology: Final. COTECH EU FP7 Integrated Project (Grant Agreement no.: CP-IP 214491-2)

Stefania Gasparin, Guido Tosello, Hans Nørgaard Hansen, Mnafred Prantl, Ben Whiterside

Research output: Book/ReportReportResearchpeer-review

Abstract

The present chapter introduces the state of the art of the available technologies for carrying out micro and nano dimensional measurements, a description of the available calibration standards and a prospection of the future needs in the metrology field
Original languageEnglish
Number of pages151
Publication statusPublished - 2010
SeriesCOnverging TECHnologies for micro systems manufacturing

Bibliographical note

SP 4 - Material optimisation, simulation, quality control and reliability. WP 4.3 - Development and standardization of new quality control technology

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