Report on non-destructive traceable measuring technologies for micro systems metrology: Final. COTECH EU FP7 Integrated Project (Grant Agreement no.: CP-IP 214491-2)

Stefania Gasparin; Guido Tosello; Hans Nørgaard Hansen; Mnafred Prantl; Ben Whiterside

Report on non-destructive traceable measuring technologies for micro systems metrology: Final. COTECH EU FP7 Integrated Project (Grant Agreement no.: CP-IP 214491-2)

Stefania Gasparin, Guido Tosello, Hans Nørgaard Hansen, Mnafred Prantl, Ben Whiterside

Research output: Book/Report › Report › Research › peer-review

Abstract

The present chapter introduces the state of the art of the available technologies for carrying out micro and nano dimensional measurements, a description of the available calibration standards and a prospection of the future needs in the metrology field

Original language	English

Number of pages	151
Publication status	Published - 2010

Series	COnverging TECHnologies for micro systems manufacturing

Bibliographical note

SP 4 - Material optimisation, simulation, quality control and reliability. WP 4.3 - Development and standardization of new quality control technology

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title = "Report on non-destructive traceable measuring technologies for micro systems metrology: Final. COTECH EU FP7 Integrated Project (Grant Agreement no.: CP-IP 214491-2)",

abstract = "The present chapter introduces the state of the art of the available technologies for carrying out micro and nano dimensional measurements, a description of the available calibration standards and a prospection of the future needs in the metrology field",

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Report on non-destructive traceable measuring technologies for micro systems metrology: Final. COTECH EU FP7 Integrated Project (Grant Agreement no.: CP-IP 214491-2). / Gasparin, Stefania; Tosello, Guido ; Hansen, Hans Nørgaard et al.
2010. 151 p. (COnverging TECHnologies for micro systems manufacturing).

Research output: Book/Report › Report › Research › peer-review

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Report on non-destructive traceable measuring technologies for micro systems metrology: Final. COTECH EU FP7 Integrated Project (Grant Agreement no.: CP-IP 214491-2)

Abstract

Bibliographical note

OpenUrl availability

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Cite this