Abstract
The present deliverable contains the report of the work and results achieved within
the framework of WP 2.3 / Task 2.3.2 on “Surface treatments and thin layers/films
deposition to improve process output”.
Original language | English |
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Number of pages | 27 |
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Publication status | Published - 2011 |
Series | COnverging TECHnologies for micro systems manufacturing |
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