Report on best practice for micro/nano replication process data acquisition systems

COTECH process characterization

Research output: Book/ReportReport

Abstract

The main objective of this deliverable is to collect detailed description on the best practice for micro/ nano replication process data acquisition system. In particular the following aspects are summed up in the deliverable: Process requirements for COTECH demonstrators General description of the processes and process parameters State-of-the-art process control and data acquisition systems Sensor integration in COTECH tools Expected COTECH improvement in process control and data acquisition system Information provide by this deliverable will be used as input to the COTECH process control system. This report presents the important processes and process parameters required for the realization of COTECH demonstrator. It also presents the cutting edge sensor systems used for different process and set a guideline to integrate sensors in COTECH tools.
Original languageEnglish
PublisherCOTECH administrator
VolumeCOTECH D4.2.1
Edition1st
Number of pages48
Publication statusPublished - 2009
SeriesCOTECH Deliverables
NumberCOTECH D 4.2.1

Bibliographical note

CP-IP 214491-2 COTECH

Cite this

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title = "Report on best practice for micro/nano replication process data acquisition systems: COTECH process characterization",
abstract = "The main objective of this deliverable is to collect detailed description on the best practice for micro/ nano replication process data acquisition system. In particular the following aspects are summed up in the deliverable: Process requirements for COTECH demonstrators General description of the processes and process parameters State-of-the-art process control and data acquisition systems Sensor integration in COTECH tools Expected COTECH improvement in process control and data acquisition system Information provide by this deliverable will be used as input to the COTECH process control system. This report presents the important processes and process parameters required for the realization of COTECH demonstrator. It also presents the cutting edge sensor systems used for different process and set a guideline to integrate sensors in COTECH tools.",
author = "Islam, {Mohammad Aminul}",
note = "CP-IP 214491-2 COTECH",
year = "2009",
language = "English",
volume = "COTECH D4.2.1",
publisher = "COTECH administrator",
edition = "1st",

}

Islam, MA 2009, Report on best practice for micro/nano replication process data acquisition systems: COTECH process characterization. COTECH Deliverables, no. COTECH D 4.2.1, vol. COTECH D4.2.1, 1st edn, COTECH administrator.

Report on best practice for micro/nano replication process data acquisition systems : COTECH process characterization. / Islam, Mohammad Aminul.

1st ed. COTECH administrator, 2009. 48 p. (COTECH Deliverables; No. COTECH D 4.2.1).

Research output: Book/ReportReport

TY - RPRT

T1 - Report on best practice for micro/nano replication process data acquisition systems

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PY - 2009

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N2 - The main objective of this deliverable is to collect detailed description on the best practice for micro/ nano replication process data acquisition system. In particular the following aspects are summed up in the deliverable: Process requirements for COTECH demonstrators General description of the processes and process parameters State-of-the-art process control and data acquisition systems Sensor integration in COTECH tools Expected COTECH improvement in process control and data acquisition system Information provide by this deliverable will be used as input to the COTECH process control system. This report presents the important processes and process parameters required for the realization of COTECH demonstrator. It also presents the cutting edge sensor systems used for different process and set a guideline to integrate sensors in COTECH tools.

AB - The main objective of this deliverable is to collect detailed description on the best practice for micro/ nano replication process data acquisition system. In particular the following aspects are summed up in the deliverable: Process requirements for COTECH demonstrators General description of the processes and process parameters State-of-the-art process control and data acquisition systems Sensor integration in COTECH tools Expected COTECH improvement in process control and data acquisition system Information provide by this deliverable will be used as input to the COTECH process control system. This report presents the important processes and process parameters required for the realization of COTECH demonstrator. It also presents the cutting edge sensor systems used for different process and set a guideline to integrate sensors in COTECH tools.

M3 - Report

VL - COTECH D4.2.1

BT - Report on best practice for micro/nano replication process data acquisition systems

PB - COTECH administrator

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Islam MA. Report on best practice for micro/nano replication process data acquisition systems: COTECH process characterization. 1st ed. COTECH administrator, 2009. 48 p. (COTECH Deliverables; No. COTECH D 4.2.1).