Replication quality control of metal and polymer micro structured optical surfaces

Stefania Gasparin, Guido Tosello, Hans Nørgaard Hansen, I. Di Vora, S. Priante, S. Sinesi

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Non contact measurements are preferred for the characterization of ultra-finely finished surfaces which is particularly challenging if damages of the structures should be avoided. However, it is not always possible to use these methods because low roughness in metallic materials, as optical surfaces, quite often results in mirror-like surfaces which scatter the light and invalidate the optical measurements. This paper focuses on an analysis of a micro-structured optical component and the corresponding mould. A first investigation leads to a control of the manufacturing process through a control of the product. The purpose is to evaluate three critical dimensions. Results show that the difference of the measurements on different areas of the mould and the polymer component is approximately 4%. A second analysis focuses on the investigation of the optical component and its mould using replication methods based on polymer casting. The replica method is used in order to avoid damages of the structures and make feasible the measurement of optical specimens with non-contact instruments. Results show a quality replication equal to 95 - 99%. In both investigations the uncertainty of the measurements is assessed following the substitution method.
Original languageEnglish
Title of host publication4. International Swedish Production Symposium
Publication date2011
Publication statusPublished - 2011
Event4th International Swedish Production Symposium - Göteborg, Sweden
Duration: 3 May 20115 May 2011
Conference number: 4


Conference4th International Swedish Production Symposium


  • Optical surfaces
  • Replication quality control
  • Surface metrology


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