Replication fidelity at μm-nm scale: PolyNano Project Report Milestone 6.3.1 (WP6 Process Chain Validation, Task 6.1 Metrology and inspection)

Matteo Calaon; Guido Tosello; Hans Nørgaard Hansen

Replication fidelity at μm-nm scale: PolyNano Project Report Milestone 6.3.1 (WP6 Process Chain Validation, Task 6.1 Metrology and inspection)

Research output: Book/Report › Report › Research

Original language	English

Number of pages	14
Publication status	Published - 2013

Bibliographical note

The report is confidential and therefore not available online

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Cite this

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title = "Replication fidelity at μm-nm scale: PolyNano Project Report Milestone 6.3.1 (WP6 Process Chain Validation, Task 6.1 Metrology and inspection)",

author = "Matteo Calaon and Guido Tosello and Hansen, \{Hans N{\o}rgaard\}",

note = "The report is confidential and therefore not available online",

year = "2013",

language = "English",

}

TY - RPRT

T1 - Replication fidelity at μm-nm scale

T2 - PolyNano Project Report Milestone 6.3.1 (WP6 Process Chain Validation, Task 6.1 Metrology and inspection)

AU - Calaon, Matteo

AU - Tosello, Guido

AU - Hansen, Hans Nørgaard

N1 - The report is confidential and therefore not available online

PY - 2013

Y1 - 2013

M3 - Report

BT - Replication fidelity at μm-nm scale

ER -