Replication fidelity assessment of polymer large area sub-μm structured surfaces using fast angular intensity distribution measurements.

M. Calaon, H. N. Hansen, G. Tosello, J. Weirich, J. Garnæs, P. T. Tang

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    Abstract

    The present investigation addresses one of the key challenges in the product quality control of transparent polymer substrates, identified in the replication fidelity of sub-μm structures over large area. Additionally the work contributes to the development of new techniques focused on in-line characterization of large nanostructured surfaces. In particular the aim of the present paper is to introduce initial development of a metrology approach to quantify the replication fidelity of produced 500 nm diameter semi-spheres via anodizing of aluminum (Al) and subsequent nickel electroforming to COC injection molded polymer parts. Calibrated AFM measurements were used to develop a model based on scalar diffraction theory able to calculate the expected nickel and COC substrates angular distribution of reflected and transmitted intensity respectively.
    Original languageEnglish
    Publication date2015
    Number of pages1
    Publication statusPublished - 2015
    Event15th International Conference on Metrology and Properties of Engineering Surfaces - University of North Carolina, Charlotte, United States
    Duration: 2 Mar 20155 Mar 2015
    Conference number: 15

    Conference

    Conference15th International Conference on Metrology and Properties of Engineering Surfaces
    Number15
    LocationUniversity of North Carolina
    Country/TerritoryUnited States
    CityCharlotte
    Period02/03/201505/03/2015

    Keywords

    • Nano structures replication
    • Atomic force microscopy (AFM);
    • Angular intensity distribution

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