Replication fidelity assessment of polymer large area sub-μm structured surfaces using fast angular intensity distribution measurements.

M. Calaon, H. N. Hansen, G. Tosello, J. Weirich, J. Garnæs, P. T. Tang

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Abstract

The present investigation addresses one of the key challenges in the product quality control of transparent polymer substrates, identified in the replication fidelity of sub-μm structures over large area. Additionally the work contributes to the development of new techniques focused on in-line characterization of large nanostructured surfaces. In particular the aim of the present paper is to introduce initial development of a metrology approach to quantify the replication fidelity of produced 500 nm diameter semi-spheres via anodizing of aluminum (Al) and subsequent nickel electroforming to COC injection molded polymer parts. Calibrated AFM measurements were used to develop a model based on scalar diffraction theory able to calculate the expected nickel and COC substrates angular distribution of reflected and transmitted intensity respectively.
Original languageEnglish
Publication date2015
Number of pages1
Publication statusPublished - 2015
Event15th International Conference on Metrology and Properties of Engineering Surfaces - University of North Carolina, Charlotte, NC, United States
Duration: 2 Mar 20155 Mar 2015
Conference number: 15

Conference

Conference15th International Conference on Metrology and Properties of Engineering Surfaces
Number15
LocationUniversity of North Carolina
CountryUnited States
CityCharlotte, NC
Period02/03/201505/03/2015

Keywords

  • Nano structures replication
  • Atomic force microscopy (AFM);
  • Angular intensity distribution

Cite this

Calaon, M., Hansen, H. N., Tosello, G., Weirich, J., Garnæs, J., & Tang, P. T. (2015). Replication fidelity assessment of polymer large area sub-μm structured surfaces using fast angular intensity distribution measurements.. Abstract from 15th International Conference on Metrology and Properties of Engineering Surfaces, Charlotte, NC, United States.