The present investigation addresses one of the key challenges in the product quality control of transparent polymer substrates, identified in the replication fidelity of sub-μm structures over large area. Additionally the work contributes to the development of new techniques focused on in-line characterization of large nanostructured surfaces. In particular the aim of the present paper is to introduce initial development of a metrology approach to quantify the replication fidelity of produced 500 nm diameter semi-spheres via anodizing of aluminum (Al) and subsequent nickel electroforming to COC injection molded polymer parts. Calibrated AFM measurements were used to develop a model based on scalar diffraction theory able to calculate the expected nickel and COC substrates angular distribution of reflected and transmitted intensity respectively.
|Number of pages||1|
|Publication status||Published - 2015|
|Event||15th International Conference on Metrology and Properties of Engineering Surfaces - University of North Carolina, Charlotte, NC, United States|
Duration: 2 Mar 2015 → 5 Mar 2015
Conference number: 15
|Conference||15th International Conference on Metrology and Properties of Engineering Surfaces|
|Location||University of North Carolina|
|Period||02/03/2015 → 05/03/2015|
- Nano structures replication
- Atomic force microscopy (AFM);
- Angular intensity distribution
Calaon, M., Hansen, H. N., Tosello, G., Weirich, J., Garnæs, J., & Tang, P. T. (2015). Replication fidelity assessment of polymer large area sub-μm structured surfaces using fast angular intensity distribution measurements.. Abstract from 15th International Conference on Metrology and Properties of Engineering Surfaces, Charlotte, NC, United States.