Replication fidelity assessment of large area sub-μm structured polymer surfaces using scatterometry.

M. Calaon, M. H. Madsen, J. Weirich, H. N. Hansen, G. Tosello, P. E. Hansen, J. Garnaes, P. T. Tang

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Abstract

The present study addresses one of the key challenges in the product quality control of transparent structured polymer substrates, the replication fidelity of sub-μm structures over a large area. Additionally the work contributes to the development of new techniques focused on in-line characterization of large nanostructured surfaces using scatterometry. In particular an approach to quantify the replication fidelity of high volume manufacturing processes such as polymer injection moulding is presented. Both periodic channels and semi-spherical structures were fabricated on nickel shims used for later injection moulding of Cyclic-olefin-copolymer (COC) substrate were the sub-μm features where ultimately transferred. The scatterometry system was validated using calibrated atomic force microscopy measurements and a model based on scalar diffraction theory employed to calculate the expected angular distribution of the reflected and the transmitted intensity for the nickel surfaces and structured COC and, respectively.
Original languageEnglish
Article number045005
JournalSurface Topography: Metrology and Properties
Volume3
ISSN2051-672X
DOIs
Publication statusPublished - 2015

Keywords

  • Nanometrology
  • Scatterometry
  • Injection molding

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