Replication Fidelity Assessment in Nano Moulding

Matteo Calaon; Hans Nørgaard Hansen; Guido Tosello; Jørgen Garnæs; W.  Li

doi:10.3850/978-981-09-4609-8_075

Replication Fidelity Assessment in Nano Moulding

Matteo Calaon, Hans Nørgaard Hansen, Guido Tosello, Jørgen Garnæs, W. Li

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

Innovations in nanotechnology propose applications integrating micro and nanometer structures fabricated as master geometries for final replication on polymer substrates. The possibility for polymer materials of being processed with technologies enabling large volume production introduces solutions to remove technology barrier between lab-scale proof-of-principle and high-volume low-cost production of nanotechnology-based products. In the current study research work has been devoted to develop methods and approaches to process chain characterization for final polymer micro and nano structures replication. Fidelity between nickel master geometries replicated on polymer substrates and its dependency to process variation, process conditions and features geometries were considered and quantified.

Original language	English
Title of host publication	Proceedings of the 4M/ICOMM2015 Conference
Editors	Massimiliano Annoni, Irene Fassi, Gloria J. Wiens, Stefan Dimov
Publisher	Research Publishing Services
Publication date	2015
Pages	306-309
ISBN (Electronic)	978-981-09-4609-8
DOIs	https://doi.org/10.3850/978-981-09-4609-8_075
Publication status	Published - 2015
Event	4M/ICOMM2015 Conference - Milan, Italy Duration: 31 Mar 2015 → 2 Apr 2015 http://www.4m-association.org/conference/2015

Conference

Conference	4M/ICOMM2015 Conference
Country/Territory	Italy
City	Milan
Period	31/03/2015 → 02/04/2015
Internet address	http://www.4m-association.org/conference/2015

Keywords

Nano moulding
Nano metrology
Micro and nano tooling

Access to Document

10.3850/978-981-09-4609-8_075

Cite this

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title = "Replication Fidelity Assessment in Nano Moulding",

abstract = "Innovations in nanotechnology propose applications integrating micro and nanometer structures fabricated as master geometries for final replication on polymer substrates. The possibility for polymer materials of being processed with technologies enabling large volume production introduces solutions to remove technology barrier between lab-scale proof-of-principle and high-volume low-cost production of nanotechnology-based products. In the current study research work has been devoted to develop methods and approaches to process chain characterization for final polymer micro and nano structures replication. Fidelity between nickel master geometries replicated on polymer substrates and its dependency to process variation, process conditions and features geometries were considered and quantified.",

keywords = "Nano moulding, Nano metrology, Micro and nano tooling",

author = "Matteo Calaon and Hansen, {Hans N{\o}rgaard} and Guido Tosello and J{\o}rgen Garn{\ae}s and W. Li",

year = "2015",

doi = "10.3850/978-981-09-4609-8_075",

language = "English",

pages = "306--309",

editor = "Massimiliano Annoni and Fassi, {Irene } and Wiens, {Gloria J. } and Stefan Dimov",

booktitle = "Proceedings of the 4M/ICOMM2015 Conference",

publisher = "Research Publishing Services",

note = "4M/ICOMM2015 Conference ; Conference date: 31-03-2015 Through 02-04-2015",

url = "http://www.4m-association.org/conference/2015",

}

Replication Fidelity Assessment in Nano Moulding. / Calaon, Matteo ; Hansen, Hans Nørgaard ; Tosello, Guido; Garnæs, Jørgen; Li, W. .

Proceedings of the 4M/ICOMM2015 Conference. ed. / Massimiliano Annoni; Irene Fassi; Gloria J. Wiens; Stefan Dimov. Research Publishing Services, 2015. p. 306-309.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Replication Fidelity Assessment in Nano Moulding

AU - Calaon, Matteo

AU - Hansen, Hans Nørgaard

AU - Tosello, Guido

AU - Garnæs, Jørgen

AU - Li, W.

PY - 2015

Y1 - 2015

N2 - Innovations in nanotechnology propose applications integrating micro and nanometer structures fabricated as master geometries for final replication on polymer substrates. The possibility for polymer materials of being processed with technologies enabling large volume production introduces solutions to remove technology barrier between lab-scale proof-of-principle and high-volume low-cost production of nanotechnology-based products. In the current study research work has been devoted to develop methods and approaches to process chain characterization for final polymer micro and nano structures replication. Fidelity between nickel master geometries replicated on polymer substrates and its dependency to process variation, process conditions and features geometries were considered and quantified.

AB - Innovations in nanotechnology propose applications integrating micro and nanometer structures fabricated as master geometries for final replication on polymer substrates. The possibility for polymer materials of being processed with technologies enabling large volume production introduces solutions to remove technology barrier between lab-scale proof-of-principle and high-volume low-cost production of nanotechnology-based products. In the current study research work has been devoted to develop methods and approaches to process chain characterization for final polymer micro and nano structures replication. Fidelity between nickel master geometries replicated on polymer substrates and its dependency to process variation, process conditions and features geometries were considered and quantified.

KW - Nano moulding

KW - Nano metrology

KW - Micro and nano tooling

U2 - 10.3850/978-981-09-4609-8_075

DO - 10.3850/978-981-09-4609-8_075

M3 - Article in proceedings

SP - 306

EP - 309

BT - Proceedings of the 4M/ICOMM2015 Conference

A2 - Annoni, Massimiliano

A2 - Fassi, Irene

A2 - Wiens, Gloria J.

A2 - Dimov, Stefan

PB - Research Publishing Services

T2 - 4M/ICOMM2015 Conference

Y2 - 31 March 2015 through 2 April 2015

ER -

Replication Fidelity Assessment in Nano Moulding

Abstract

Conference

Keywords

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