Replication Fidelity Assessment in Nano Moulding

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Abstract

    Innovations in nanotechnology propose applications integrating micro and nanometer structures fabricated as master geometries for final replication on polymer substrates. The possibility for polymer materials of being processed with technologies enabling large volume production introduces solutions to remove technology barrier between lab-scale proof-of-principle and high-volume low-cost production of nanotechnology-based products. In the current study research work has been devoted to develop methods and approaches to process chain characterization for final polymer micro and nano structures replication. Fidelity between nickel master geometries replicated on polymer substrates and its dependency to process variation, process conditions and features geometries were considered and quantified.
    Original languageEnglish
    Title of host publicationProceedings of the 4M/ICOMM2015 Conference
    EditorsMassimiliano Annoni, Irene Fassi, Gloria J. Wiens, Stefan Dimov
    PublisherResearch Publishing Services
    Publication date2015
    Pages306-309
    ISBN (Electronic)978-981-09-4609-8
    DOIs
    Publication statusPublished - 2015
    Event4M/ICOMM2015 Conference - Milan, Italy
    Duration: 31 Mar 20152 Apr 2015
    http://www.4m-association.org/conference/2015

    Conference

    Conference4M/ICOMM2015 Conference
    Country/TerritoryItaly
    CityMilan
    Period31/03/201502/04/2015
    Internet address

    Keywords

    • Nano moulding
    • Nano metrology
    • Micro and nano tooling

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