Replication Fidelity Assessment in Nano Moulding

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Abstract

Innovations in nanotechnology propose applications integrating micro and nanometer structures fabricated as master geometries for final replication on polymer substrates. The possibility for polymer materials of being processed with technologies enabling large volume production introduces solutions to remove technology barrier between lab-scale proof-of-principle and high-volume low-cost production of nanotechnology-based products. In the current study research work has been devoted to develop methods and approaches to process chain characterization for final polymer micro and nano structures replication. Fidelity between nickel master geometries replicated on polymer substrates and its dependency to process variation, process conditions and features geometries were considered and quantified.
Original languageEnglish
Title of host publicationProceedings of the 4M/ICOMM2015 Conference
EditorsMassimiliano Annoni, Irene Fassi, Gloria J. Wiens, Stefan Dimov
PublisherResearch Publishing Services
Publication date2015
Pages306-309
ISBN (Electronic)978-981-09-4609-8
DOIs
Publication statusPublished - 2015
Event4M/ICOMM2015 Conference - Milan, Italy
Duration: 31 Mar 20152 Apr 2015
http://www.4m-association.org/conference/2015

Conference

Conference4M/ICOMM2015 Conference
CountryItaly
CityMilan
Period31/03/201502/04/2015
Internet address

Keywords

  • Nano moulding
  • Nano metrology
  • Micro and nano tooling

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