Replication and dimensional quality control of industrial nanoscale surfaces using calibrated AFM measurements and SEM image processing

Guido Tosello, Hans Nørgaard Hansen, F. Marinello, Stefania Gasparin

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

Ultra-high precision manufacture of nanoscale structured polymer surfaces poses the highest challenges in terms of tooling and replication. This paper introduces new procedures for quality control of nickel stampers and polymer moulded discs for CD, DVD and HD-DVD manufacture: quantitative application of AFM to calibrate height, depth and pitch of sub-micrometer features and SEM image processing to detect replication accuracy in terms of number of replicated features. Surface replication is analyzed using a metrological approach: nano-features on nickel stampers and injection–compression moulded polycarbonate substrates are measured, measurement uncertainty calculated, replication fidelity assessed quantitatively, and dimensional tolerances at the nanometre scale verified.
Original languageEnglish
JournalC I R P Annals
Volume59
Issue number1
Pages (from-to)563-568
ISSN0007-8506
DOIs
Publication statusPublished - 2010

Keywords

  • Nano-structured surface
  • Atomic force microscopy
  • Metrology

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