Removal of Residues from Reactive Ion Etched Silicon Surfaces Characterized with XPS and SERS

Anna Line Brøgger, Michael Stenbæk Schmidt, Anja Boisen

    Research output: Contribution to conferencePosterResearchpeer-review

    304 Downloads (Pure)
    Original languageEnglish
    Publication date2014
    Number of pages1
    Publication statusPublished - 2014
    Event40th International Conference on Micro and Nano Engineering - Lausanne, Switzerland
    Duration: 22 Sep 201426 Sep 2014
    Conference number: 40
    http://www.mne2014.org/

    Conference

    Conference40th International Conference on Micro and Nano Engineering
    Number40
    CountrySwitzerland
    CityLausanne
    Period22/09/201426/09/2014
    Internet address

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