TY - JOUR
T1 - Reliability of poly 3,4-ethylenedioxythiophene strain gauge
AU - Mateiu, Ramona Valentina
AU - Lillemose, Michael
AU - Hansen, Thomas Steen
AU - Boisen, Anja
AU - Geschke, Oliver
PY - 2007
Y1 - 2007
N2 - We report on the experimentally observed reliability of the piezoresistive effect in strained poly 3,4-ethylenedioxythiophene (PEDT).
PEDT is an intrinsic conductive polymer which can be patterned by conventional Cleanroom processing, and thus presents a promising material for all-polymer Microsystems. The measurements are made on microfabricated test chips with PEDT resistors patterned by conventional
UV-lithography and reactive ion etching (RIE). We determine a gauge factor of 3.41 ± 0.42 for the strained PEDT and we see an increase in resistivity from 1.98 · 104 X m to 2.22 · 104 X m when the polymer is immersed in water for 30 min. The resistivity continues to increase to 2.66 · 104 X m when the resistor is thermally dried due to interactions with oxygen from the ambient. We measure
the PEDT sheet resistance over a period of four weeks and see small fluctuations caused by humidity variations.
2007 Elsevier B.V. All rights reserved.
AB - We report on the experimentally observed reliability of the piezoresistive effect in strained poly 3,4-ethylenedioxythiophene (PEDT).
PEDT is an intrinsic conductive polymer which can be patterned by conventional Cleanroom processing, and thus presents a promising material for all-polymer Microsystems. The measurements are made on microfabricated test chips with PEDT resistors patterned by conventional
UV-lithography and reactive ion etching (RIE). We determine a gauge factor of 3.41 ± 0.42 for the strained PEDT and we see an increase in resistivity from 1.98 · 104 X m to 2.22 · 104 X m when the polymer is immersed in water for 30 min. The resistivity continues to increase to 2.66 · 104 X m when the resistor is thermally dried due to interactions with oxygen from the ambient. We measure
the PEDT sheet resistance over a period of four weeks and see small fluctuations caused by humidity variations.
2007 Elsevier B.V. All rights reserved.
KW - All-polymer sensors
KW - Piezoresistive polymer
KW - Conducting polymer
U2 - 10.1016/j.mee.2007.01.192
DO - 10.1016/j.mee.2007.01.192
M3 - Journal article
SN - 0167-9317
VL - 84
SP - 1270
EP - 1273
JO - Microelectronic Engineering
JF - Microelectronic Engineering
ER -