Refractive microlenses produced by excimer laser machining of  poly(methyl methacrylate)

Martin Frøhling Jensen; Ulrich Krühne; L. H.; Oliver Geschke

doi:10.1088/0960-1317/15/1/014

Refractive microlenses produced by excimer laser machining of poly(methyl methacrylate)

Martin Frøhling Jensen, Ulrich Krühne, L. H., Oliver Geschke

Department of Chemical and Biochemical Engineering

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

A method has been developed whereby refractive microlenses can be produced in poly (methyl methacrylate) by excimer laser irradiation at λ = 248 nm. The lenses are formed by a combined photochemical and thermal process. The lenses are formed as depressions in the substrate material (negative focal length), which makes replication necessary in order to obtain lenses with a positive focal length. The method allows for considerable flexibility with respect to the pattern of lenses and the properties of the individual lenses. In this investigation it was possible to vary the diameter of the lenses between 30 and 500 μm and the focal lengths between 300 μm and several mm.

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	15
Issue number	1
Pages (from-to)	91-97
ISSN	0960-1317
DOIs	https://doi.org/10.1088/0960-1317/15/1/014
Publication status	Published - 2005

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title = "Refractive microlenses produced by excimer laser machining of poly(methyl methacrylate)",

abstract = "A method has been developed whereby refractive microlenses can be produced in poly (methyl methacrylate) by excimer laser irradiation at λ = 248 nm. The lenses are formed by a combined photochemical and thermal process. The lenses are formed as depressions in the substrate material (negative focal length), which makes replication necessary in order to obtain lenses with a positive focal length. The method allows for considerable flexibility with respect to the pattern of lenses and the properties of the individual lenses. In this investigation it was possible to vary the diameter of the lenses between 30 and 500 μm and the focal lengths between 300 μm and several mm.",

author = "Jensen, {Martin Fr{\o}hling} and Ulrich Kr{\"u}hne and L. H. and Oliver Geschke",

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N2 - A method has been developed whereby refractive microlenses can be produced in poly (methyl methacrylate) by excimer laser irradiation at λ = 248 nm. The lenses are formed by a combined photochemical and thermal process. The lenses are formed as depressions in the substrate material (negative focal length), which makes replication necessary in order to obtain lenses with a positive focal length. The method allows for considerable flexibility with respect to the pattern of lenses and the properties of the individual lenses. In this investigation it was possible to vary the diameter of the lenses between 30 and 500 μm and the focal lengths between 300 μm and several mm.

AB - A method has been developed whereby refractive microlenses can be produced in poly (methyl methacrylate) by excimer laser irradiation at λ = 248 nm. The lenses are formed by a combined photochemical and thermal process. The lenses are formed as depressions in the substrate material (negative focal length), which makes replication necessary in order to obtain lenses with a positive focal length. The method allows for considerable flexibility with respect to the pattern of lenses and the properties of the individual lenses. In this investigation it was possible to vary the diameter of the lenses between 30 and 500 μm and the focal lengths between 300 μm and several mm.

U2 - 10.1088/0960-1317/15/1/014

DO - 10.1088/0960-1317/15/1/014

M3 - Journal article

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EP - 97

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

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