A refractive index sensor has been fabricated in silicon oxynitride by standard UV lithography and dry etching processes. The refractive index sensor consists of a 1D photonic crystal (PhC) embedded in a microfluidic channel addressed by fiber-terminated planar waveguides. Experimental demonstrations performed with several ethanol solutions ranging from a purity of 96.00% (n = 1.36356) to 95.04% (n = 1.36377) yielded a sensitivity (Δλ/Δn) of 836 nm/RIU and a limit of detection (LOD) of 6 x 10-5 RIU, which is, however, still one order of magnitude higher than the theoretical lower limit of the limit of detection 1.3 x 10–6 RIU.
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- 1D photonic crystal
- integrated waveguides
- refractive index sensor