The report presents methods and procedure to establish the traceability of measurements at both micro and sub-micro dimensional scales. Reference artefacts and new methodologies to ensure traceability of dimensional and geometrical 3D measurements (absolute dimensions below 3 mm, micro features with critical dimensions below 100 μm, roughness lower than 100 nm) have been developed to allow validation and verification of product and process tolerances as developed within the COTECH project.
|Number of pages||44|
|Publication status||Published - 2011|
|Series||COnverging TECHnologies for micro systems manufacturing|
SP4 – Material Optimization, Simulation, Quality Control and Reliability, WP4.3 – Development and standardization of new quality control technology