Abstract
Micro- and nanomechanical resonators are widely being used as mass sensors due to their unprecedented mass sensitivity. We present a simple closed-form expression which allows a fast and quantitative calculation of the position and mass of individual particles placed on a micro or nano string by measuring the resonant frequency shifts of the first two bending modes. The method has been tested by detecting the mass spectrum of micro particles placed on a micro string. This method enables real-time mass spectrometry necessary for applications such as personal monitoring devices for the assessment of the exposure dose of airborne nanoparticles.
Original language | English |
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Journal | Sensors |
Volume | 10 |
Issue number | 9 |
Pages (from-to) | 8092-8100 |
ISSN | 1424-8220 |
DOIs | |
Publication status | Published - 2010 |
Bibliographical note
This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/.)Keywords
- particle sensor
- micro beads
- MEMS
- mass spectrometry
- string resonator
- aerosol
- nanoparticles
- NEMS