Reactive ion etching in silica-on-silicon planar waveguide technology

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationECIO
    Publication date2003
    Publication statusPublished - 2003
    Event11th European Conference on Integrated Optics - Prague, Czech Republic
    Duration: 2 Apr 20034 Apr 2003
    Conference number: 11

    Conference

    Conference11th European Conference on Integrated Optics
    Number11
    Country/TerritoryCzech Republic
    CityPrague
    Period02/04/200304/04/2003

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