Reactive ion etching in silica-on-silicon planar waveguide technology

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationECIO
Publication date2003
Publication statusPublished - 2003
Event11th European Conference on Integrated Optics - Prague, Czech Republic
Duration: 2 Apr 20034 Apr 2003
Conference number: 11

Conference

Conference11th European Conference on Integrated Optics
Number11
CountryCzech Republic
CityPrague
Period02/04/200304/04/2003

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