RBS/Simulated Annealing and FTIR characterisation of boron-carbon-nitride films deposited by dual cathode magnetron sputtering

N.P. Barradas; C. Jeynes; Yukihiro Kusano; J.E. Evetts; I.M. Hutchings

RBS/Simulated Annealing and FTIR characterisation of boron-carbon-nitride films deposited by dual cathode magnetron sputtering

N.P. Barradas
, C. Jeynes
, Yukihiro Kusano
, J.E. Evetts
, I.M. Hutchings

University of Cambridge
University of Surrey

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98)
Editors	J.L. Duggan, I.L. Morgan
Publication date	1999
Pages	504-507
Publication status	Published - 1999
Externally published	Yes
Event	15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98) - Denton, TX, United States Duration: 4 Nov 1998 → 7 Nov 1998

Conference

Conference	15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98)
Country/Territory	United States
City	Denton, TX
Period	04/11/1998 → 07/11/1998

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Cite this

Barradas, N. P., Jeynes, C., Kusano, Y., Evetts, J. E., & Hutchings, I. M. (1999). RBS/Simulated Annealing and FTIR characterisation of boron-carbon-nitride films deposited by dual cathode magnetron sputtering. In J. L. Duggan, & I. L. Morgan (Eds.), Proceedings of 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98) (pp. 504-507)

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title = "RBS/Simulated Annealing and FTIR characterisation of boron-carbon-nitride films deposited by dual cathode magnetron sputtering",

author = "N.P. Barradas and C. Jeynes and Yukihiro Kusano and J.E. Evetts and I.M. Hutchings",

year = "1999",

language = "English",

pages = "504--507",

editor = "J.L. Duggan and I.L. Morgan",

booktitle = "Proceedings of 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98)",

note = "15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98), CAARI '98 ; Conference date: 04-11-1998 Through 07-11-1998",

}

Barradas, NP, Jeynes, C, Kusano, Y, Evetts, JE & Hutchings, IM 1999, RBS/Simulated Annealing and FTIR characterisation of boron-carbon-nitride films deposited by dual cathode magnetron sputtering. in JL Duggan & IL Morgan (eds), Proceedings of 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98). pp. 504-507, 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98), Denton, TX, United States, 04/11/1998.

RBS/Simulated Annealing and FTIR characterisation of boron-carbon-nitride films deposited by dual cathode magnetron sputtering. / Barradas, N.P.; Jeynes, C.; Kusano, Yukihiro et al.
Proceedings of 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98). ed. / J.L. Duggan; I.L. Morgan. 1999. p. 504-507.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - RBS/Simulated Annealing and FTIR characterisation of boron-carbon-nitride films deposited by dual cathode magnetron sputtering

AU - Barradas, N.P.

AU - Jeynes, C.

AU - Kusano, Yukihiro

AU - Evetts, J.E.

AU - Hutchings, I.M.

PY - 1999

Y1 - 1999

M3 - Article in proceedings

SP - 504

EP - 507

BT - Proceedings of 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98)

A2 - Duggan, J.L.

A2 - Morgan, I.L.

T2 - 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98)

Y2 - 4 November 1998 through 7 November 1998

ER -