RBS/Simulated Annealing and FTIR characterisation of boron-carbon-nitride films deposited by dual cathode magnetron sputtering

N.P. Barradas, C. Jeynes, Yukihiro Kusano, J.E. Evetts, I.M. Hutchings

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of 15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98)
EditorsJ.L. Duggan, I.L. Morgan
Publication date1999
Pages504-507
Publication statusPublished - 1999
Externally publishedYes
Event15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98) - Denton, TX, United States
Duration: 4 Nov 19987 Nov 1998

Conference

Conference15th International Conference on the Application of Accelerators in Research and Industry (CAARI '98)
CountryUnited States
CityDenton, TX
Period04/11/199807/11/1998

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