Original language | English |
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Journal | Microelectronic Engineering |
Volume | 67-68 |
Pages (from-to) | 473-478 |
ISSN | 0167-9317 |
Publication status | Published - 2003 |
Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water
Daniel Häfliger, B.P. Cahill, A. Stemmer
Research output: Contribution to journal › Journal article › Research › peer-review