Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water

Daniel Häfliger, B.P. Cahill, A. Stemmer

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume67-68
    Pages (from-to)473-478
    ISSN0167-9317
    Publication statusPublished - 2003

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