Radical production efficiency and electrical characteristics of a coplanar barrier discharge built by multilayer ceramic technology

Indrek Jõgi, Kalev Erme, Erik Levoll, Eugen Stamate

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

The present study investigated the electrical characteristics and radical production efficiency of a coplanar barrier discharge (CBD) device manufactured by Kyocera by multilayer ceramic technology. The device consisted of a number of linear electrodes with electrode and gap widths of 0.75 mm, immersed into a ceramic dielectric barrier. A closed flow-through system necessary for the measurements was prepared by placing a quartz plate at a height of 3 mm from the ceramic barrier. The production of nitrogen radicals was determined from the removal of a trace amount of NO in pure N2 gas, while the production of oxygen radicals was determined by ozone production in pure O2 or synthetic air. The production efficiency of N and O radicals and NO oxidation in synthetic air was comparable with the efficiency of a volume barrier discharge device. The power density per unit of surface area of the CBD device was more than two times larger than that of a similar volume barrier discharge setup, which makes the CBD device a compact alternative for gas treatment. The production of ozone and different nitrogen oxides was also evaluated for the open system of the CBD which is usable for surface treatment. The ozone concentration of this system was nearly independent from the input power, while the concentration of nitrogen oxides increased with input power. The open system of the CBD was additionally tested for the treatment of a silicon surface. An increase of applied power decreased the time required to reduce the water contact angle below 10 degrees but also started to have an impact on the surface roughness.
Original languageEnglish
Article number465201
JournalJournal of Physics D: Applied Physics
Volume50
Issue number46
Number of pages12
ISSN0022-3727
DOIs
Publication statusPublished - 2017

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