Radial and axial profiles in a diffused Ar/SF6 electronegative plasma with bi-Maxwellian electrons

Radial and axial profiles in a diffused Ar/SF₆ electronegative plasma with bi-Maxwellian electrons

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

Original language	English
Publication date	2000
Publication status	Published - 2000
Externally published	Yes
Event	11th International Toki Conference - Toki, Japan Duration: 5 Dec 2000 → 8 Dec 2000 Conference number: 11

Conference	11th International Toki Conference
Number	11
Country/Territory	Japan
City	Toki
Period	05/12/2000 → 08/12/2000